“Fused Silica” or “Fused Quartz” which is the amorphous phase of quartz (SiO2). When contrasted to borosilicate glass, fused silica has no additives; hence it exists in its pure form, SiO2. Fused silica has a higher transmission in the infrared and ultraviolet spectrum when compared to normal glass. Fused silica is produced by melting and re-solidifying ultrapure SiO2. Synthetic fused silica on the other hand is made from silicon-rich chemical precursors such as SiCl4 which are gasified and then oxidized in a H2 + O2 atmosphere. The SiO2 dust formed in this case is fused to silica on a substrate. The fused silica blocks are cut into wafers after which the wafers are finally polished.
| Size | Inch | 2″ | 3″ | 4″ | 6″ | 8″ | 10″ | 12” |
|---|
| Diameter | mm | 50.8 | 76.2 | 100 | 150 | 200 | 250 | 300 |
| Tolerance (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Thickness | µm | 100 and up | 100 and up | 100 and up | 300 and up | 400 and up | 500 and up | 500 and up |
| Primary reference flat | mm | 32.5 | 32.5 | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5mmx5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | µm | < 2 | < 2 | < 2 | < 3 | <3 | <5 | <5 |
| Bow | µm | ±20 | ±20 | ±20 | ±30 | ±40 | ±40 | ±40 |
| Warp | µm | ≤ 30 | ≤ 30 | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV(5mm*5mm)<0.4um | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Edge Rounding | mm | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. | SEMI Std. |
| Surface Type | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | SSP/DSP | |
| Surface Roughness | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
6inch 150mm Silicon Carbide SiC Wafers 4H-N type for MOS or SBD Production Research and Dummy grade Prime silicon wafer for semiconductor Solar Cells P type N type,2 to 12inch 鑫科汇提供优质晶圆
